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Automatic Panel FOUP cleaner

Model: NFC-R510

Category: Semiconductor Smart Auto Solution

Exhibitor: ASIA NEO TECH INDUSTRIAL CO., LTD.

Booth No: N114

Characteristic

☆Rinse with DI water
☆XCDA + high pressure dust-free air knife drying
☆Vacuum drying
☆Manipulator workstation handling
☆DI water heater (option)
☆FOUP layer distance inspection (option)
☆FOUP internal dryness (humidity) inspection (option)
☆SEMI S2/S8 certification
☆UPH 6 pcs/hr

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