WaferSense Airborne Particle Sensor™ (APS3)

 

產品分類：先進設備 - 關鍵模組暨零組件

廠商名稱：美商速博光學股份有限公司台灣分公司

攤位號碼：M533

 

產品特色

 

Thinner. Lighter. Precision accuracy.

The next generation of the APS improves equipment set-up and yields by wirelessly monitoring airborne particles in real-time.

Quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.14μm within semiconductor process equipment and automated material handling systems. Easily identifies when and where the particles originate. Now in 150mm, 200mm and 300mm sizes. Chemically Hardened Glass (CHG) version available in 300mm.

 

相關產品

 

• 

  MX3000™ 3D AOI

• 

  In-line Particle Sensor™ (IPS™)

• 

  SQ3000™+ Multi-Function for 3D AOI, SPI & CMM

• 

  SQ3000™ 3D CMM for Semiconductor Applications

• 

  PX3000™ Custom 3D AOI Inspection System for Advanced Packaging

• 

  WX3000™ Metrology and Inspection System

• 

  WaferSense Auto Vibration and Leveling Sensor™ (AVLS3)

 

 

 

回列表