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WaferSense Auto Vibration and Leveling Sensor™ (AVLS3)

產品分類：先進設備 - 關鍵模組暨零組件

廠商名稱：美商速博光學股份有限公司台灣分公司

攤位號碼：M533

產品特色

Speed real-time vibration and leveling measurements.

Speed equipment qualification with wireless measurements.
Shorten equipment maintenance cycles with thin and wafer-like form factor.
Lower equipment maintenance expenses and enhance process uniformity with objective and reproducible data.

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