In-line Particle Sensor™ (IPS™)

 

產品分類：先進設備 - 關鍵模組暨零組件

廠商名稱：美商速博光學股份有限公司台灣分公司

攤位號碼：M533

 

產品特色

 

24/7 detection of small particles in gas and vacuum lines.

Based on our WaferSense Airborne Particle Sensor™ technology, IPS utilizes a high power blue laser to quickly monitor, identify and enable troubleshooting of particles down to 0.1µm within gas and vacuum line locations for process sensitive applications.

 

相關產品

 

• 

  WaferSense Airborne Particle Sensor™ (APS3)

• 

  MX3000™ 3D AOI

• 

  WX3000™ Metrology and Inspection System

• 

  PX3000™ Custom 3D AOI Inspection System for Advanced Packaging

• 

  SQ3000™ 3D CMM for Semiconductor Applications

• 

  SQ3000™+ Multi-Function for 3D AOI, SPI & CMM

• 

  WaferSense Auto Vibration and Leveling Sensor™ (AVLS3)

 

 

 

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