Wafer Inspection

 

產品型號：INSPECTRA3000SR-III200 (PL)

產品分類：檢測

廠商名稱：日商東麗科技工程股份有限公司台灣分公司

攤位號碼：L230

 

產品特色

 

* Inspection of the pattern defects and luminance failure for LED
* Method: emit light optically in Non contact LED chip
* High throughput: around 3 mins [Φ 4inch]
* Pixel resolution: 0.325um ~
* Quality control of R, G, B LED chip
-EPI defect, luminance failure and shift of emission wavelength
* Quality control of Transfer process
- External defects, bonding failure and chip shift after each transfer
→　INSPECTRA will solve problems!

 

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