WaferSense® Auto Teaching System™ (ATS2)

 

產品分類：先進設備 - 關鍵模組暨零組件

廠商名稱：美商速博光學股份有限公司台灣分公司

攤位號碼：M533

 

產品特色

 

Speed achieving accurate wafer hand-off calibration, proper alignment and set-ups.
“Sees” inside semiconductor equipment to capture three dimensional offset data (x, y and z) to quickly teach wafer transfer positions with accuracy to 50μm.

-Improve yields and lower particulate contamination with accurate wafer handoff calibration.
-Achieve repeatable and reproducible semiconductor equipment setups.
-Reduce equipment downtime from hours to minutes.
-Speed troubleshooting and lower consumable expense with visual inspection.

Semiconductor fabs and OEMs worldwide value the accuracy, precision and versatility of the WaferSense ATS2 – The most efficient and effective wireless measurement device for wafer handoff teaching.

 

相關產品

 

• 

  WaferSense Airborne Particle Sensor™ (APS3)

• 

  WaferSense Auto Vibration and Leveling Sensor™ (AVLS3)

• 

  In-line Particle Sensor™ (IPS™)

• 

  MRS™ Sensor Technology

 

 

 

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