WaferSense® Auto Teaching System™ (ATS2)
產品分類:先進設備 - 關鍵模組暨零組件
廠商名稱:美商速博光學股份有限公司台灣分公司
攤位號碼:M533
產品特色
Speed achieving accurate wafer hand-off calibration, proper alignment and set-ups.
“Sees” inside semiconductor equipment to capture three dimensional offset data (x, y and z) to quickly teach wafer transfer positions with accuracy to 50μm.
-Improve yields and lower particulate contamination with accurate wafer handoff calibration.
-Achieve repeatable and reproducible semiconductor equipment setups.
-Reduce equipment downtime from hours to minutes.
-Speed troubleshooting and lower consumable expense with visual inspection.
Semiconductor fabs and OEMs worldwide value the accuracy, precision and versatility of the WaferSense ATS2 – The most efficient and effective wireless measurement device for wafer handoff teaching.
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