In-line Particle Sensor™ (IPS™)

 

產品分類：先進設備 - 關鍵模組暨零組件

廠商名稱：美商速博光學股份有限公司台灣分公司

攤位號碼：M533

 

產品特色

 

24/7 detection of small particles in gas and vacuum lines.
Based on our WaferSense® Airborne Particle Sensor™ technology, IPS utilizes a high power blue laser to quickly monitor, identify and enable troubleshooting of particles down to 0.1μm within gas and vacuum line locations for process sensitive applications.

-Speed equipment qualification with real-time 24/7 monitoring.
-Shorten equipment maintenance cycles with inline particle sensing.
-Lower equipment expenses with objective and reproducible data.
-Install IPS in multiple line locations for a variety of applications.

Semiconductor fabs and OEMs worldwide value the accuracy, precision and versatility of CyberOptics semiconductor measurement devices. The most efficient and effective measurement devices for tool optimization, stabilization and standardization.

 

相關產品

 

• 

  WaferSense Auto Vibration and Leveling Sensor™ (AVLS3)

• 

  WaferSense® Auto Teaching System™ (ATS2)

• 

  WaferSense Airborne Particle Sensor™ (APS3)

• 

  MRS™ Sensor Technology

 

 

 

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