WaferSense Auto Vibration and Leveling Sensor™ (AVLS3)
產品分類:先進設備 - 關鍵模組暨零組件
廠商名稱:美商速博光學股份有限公司台灣分公司
攤位號碼:M533
產品特色
Speed real-time vibration and leveling measurements.
-Speed equipment qualification with wireless measurements.
-Shorten equipment maintenance cycles with thin and wafer-like form factor.
-Lower equipment maintenance expenses and enhance process uniformity with objective and reproducible data.
Semiconductor fabs and OEMs worldwide value the accuracy, precision and versatility of the WaferSense AVLS3 - The most efficient and effective wireless measurement device for leveling and vibration.
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