WaferSense Auto Vibration and Leveling Sensor™ (AVLS3)

 

產品分類：先進設備 - 關鍵模組暨零組件

廠商名稱：美商速博光學股份有限公司台灣分公司

攤位號碼：M533

 

產品特色

 

Speed real-time vibration and leveling measurements.

-Speed equipment qualification with wireless measurements.
-Shorten equipment maintenance cycles with thin and wafer-like form factor.
-Lower equipment maintenance expenses and enhance process uniformity with objective and reproducible data.

Semiconductor fabs and OEMs worldwide value the accuracy, precision and versatility of the WaferSense AVLS3 - The most efficient and effective wireless measurement device for leveling and vibration.

 

相關產品

 

• 

  WaferSense® Auto Teaching System™ (ATS2)

• 

  WaferSense Airborne Particle Sensor™ (APS3)

• 

  In-line Particle Sensor™ (IPS™)

• 

  MRS™ Sensor Technology

 

 

 

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