WaferSense Airborne Particle Sensor™ (APS3)

 

產品分類：先進設備 - 關鍵模組暨零組件

廠商名稱：美商速博光學股份有限公司台灣分公司

攤位號碼：M533

 

產品特色

 

Thinner. Lighter. Precision accuracy.
The next generation of the APS improves equipment set-up and yields by wirelessly monitoring airborne particles in real-time.
Quickly monitors, identifies and enables troubleshooting of airborne particles down to 0.14μm within semiconductor process equipment and automated material handling systems. Easily identifies when and where the particles originate. Now in 150mm, 200mm and 300mm sizes.

-Speed equipment qualification with wireless measurements.
-Shorten equipment maintenance cycles with wafer-like form factor.
-Lower equipment expenses with objective and reproducible data.

Semiconductor fabs and OEMs worldwide value the accuracy, precision and versatility of the WaferSense APS3 – The most efficient and effective wireless measurement device for airborne particles.

 

相關產品

 

• 

  In-line Particle Sensor™ (IPS™)

• 

  MRS™ Sensor Technology

• 

  WaferSense Auto Vibration and Leveling Sensor™ (AVLS3)

• 

  WaferSense® Auto Teaching System™ (ATS2)

 

 

 

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