MOCVD System
Spin Coater/Developer
6-inch/8-inch SiC 4H N-Type Substrate
In-Situ Macro Inspection System
Thermal-Chiller Heater Exchanger
Compound Semiconductor Etching System
E-Beam Evaporator
Photo Mask Repair System
TCP150 High Replication Embossing System
Micro Inspection System