MULTI-DOF TECHNOLOGY

 

Model: HEIDENHAIN PP6000

Category: Semiconductor Package Equipment

Exhibitor: HEIDENHAIN CO., LTD.(TAIWAN)

Booth No: L218

 

Characteristic

 

In the component solutions for equipment motion control platforms, optical scales play a critical role. Traditional optical scales can only measure position in a single degree of freedom, and errors in other degrees of freedom cannot be measured, which limits the ability to improve precision. As a result, in advanced process yield improvements, significant bottlenecks arise. To address this issue, traditional methods require multiple optical scales and multiple reading heads to handle precision measurement across multiple degrees of freedom. After obtaining more complete measurement data from the backend equipment, compensation and calibration can be applied to ensure optimal operational precision and stability of the overall system. However, this approach makes the overall system design very complex and inefficient.

To solve this problem, HEIDENHAIN's 2D plane encoder PP 6000 can directly feedback measurement values for the X, Y, and Rz degrees of freedom, allowing equipment manufacturers to use the data directly without additional calculations. This greatly shortens operation time and improves the overall system's precision to the nanometer level. The PP 6000 offers four optical etching plate sizes, ranging from 60mm x 60mm to 464mm x 464mm, depending on the size of the wafer, providing equipment manufacturers with a range of options for application.

 

Other Products

 

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  Robot and cobot rotary encoders

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  QUIET active isolation system

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  AccurET+ Position Controllers

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  VULCANO 2

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  Total solution for semiconductor manufacturing

 

 

 

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