OPTEC Laser Lift Off (LLO) Debonding
Model: Light Bench LB2-250-LLO
Category: Semiconductor Package Equipment
Exhibitor: SUPERBIN COMPANY, LTD.
Booth No: L327
Characteristic
Careful consideration must be taken to avoid overheating the sample, and degrading the quality of the product. This fact, combined with the relatively low energy threshold required to successfully create the plasma makes excimer lasers perfect candidates for this technique. Indeed, their large homogenized flat top beams, short pulses and low repetition rates guarantee a uniform treatment of the surface whilst avoiding significant temperature gradients.
Optec offers standard products including the Light Bench LB2-250-LLO with either compact or large format excimer laser at 308nm or 248nm, and the fully automated Laser Blade Debonder like LDB-250-LLO with robotic loading & unloading of wafers.
 KEY FEATURES
 Motorized X,Y,Z axes
 308nm laser wavelength
 Up to 45mm beam line length
 >600mJ/cm² on the Off axis vision part
 User friendly softwares
 CAD compatible
 All granite structure
 Class 1 machine
 OPTIONS
 248nm laser wavelength
 Switchable beam line length
 75mm beam line length
 Fully Automated part loading/unloading
 Motorized Theta stages
 Beam profiler on target position
 Energy meter on target position
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