Wafer Inspection / INSPECTRA3000SR-III200 (PL)
Model: INSPECTRA3000SR-III200 (PL)
Category: Inspection
Exhibitor: TORAY ENGINEERING CO.,LTD. TAIWAN BRANCH
Booth No: L230
Characteristic
* Inspection of the pattern defects and luminance failure for LED
* Method: emit light optically in Non contact LED chip
* High throughput: around 3 mins [Φ 4inch]
* Pixel resolution: 0.325um ~
* Quality control of R, G, B LED chip
-EPI defect, luminance failure and shift of emission wavelength
* Quality control of Transfer process
- External defects, bonding failure and chip shift after each transfer
→ INSPECTRA will solve problems!
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