MFS
Model: MFS
Category: Compound Semiconductor Equipment
Exhibitor: SINOM CORPORATION
Booth No: N304
Characteristic
微流道流量計
MFS流量範圍:
0 ~ ± 1.5μL/min水
0 ~ ± 7μL/min水,0 ~ ± 70μL/min IPA
0 ~ ± 80μL/min水,0 ~ ± 500μL/min IPA
0 ~ ± 1ml/min水,0 ~ ± 10mL/min IPA
0 ~ ± 5ml/min水
雙向流量(壓力或真空)
接頭:UNF 1/4-28
接液材質:PEEK
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