Micro Inspection System
Model: MARS X8 Plus
Category: Inspection
Exhibitor: HERMES-EPITEK CORP.
Booth No: M412
Characteristic
￭ E-Beam Defect Analysis Solution for Framed-type Wafer
￭ Non-destructive/ enlarge chamber and special-design handler
￭ No need coating / advanced charge reduction system
￭ Recipe running/ high-accuracy positioning system
￭ Capable to import AOI inspection defect coordinates for SEM/EDS analysis
￭ Combine automation and defect intelligent analysis
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