Photo Mask Repair System
Category: Repair and Defect Management
Exhibitor: HERMES-EPITEK CORP.
Booth No: M412
Characteristic
■ Repair of Semiconductor, LCD, OLED, PCB Mask
■ Binary & Halftone Mask Repair
■ Minimum Size : ZAP Repair<0.7um, CVD Repair<1um
■ Transmissivity measurement
■ Real-Time Laser power monitoring system
■ Flexibility for Mask size and Compatible with MGV
■ Pattern Copy and Edge lock function
■ Pellicle Available
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