Photo Mask Repair System
Category: Repair and Defect Management
Exhibitor: HERMES-EPITEK CORP.
Booth No: M412
Characteristic
￭ Repair of Semiconductor, LCD, OLED, PCB Mask
￭ Binary & Halftone Mask Repair
￭ Minimum Size : ZAP Repair<0.7um, CVD Repair<1um
￭ Transmissivity measurement
￭ Real-Time Laser power monitoring system
￭ Flexibility for Mask size and Compatible with MGV
￭ Pattern Copy and Edge lock function
￭ Pellicle Available
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