In-Situ Macro Inspection System
Category: Inspection
Exhibitor: HERMES-EPITEK CORP.
Booth No: M412
Characteristic
￭ FAB space-saving:
No additional FAB space is required; the built-in design does not occupy FAB spaces.
￭ 100% Auto inspection:
Non-personnel random inspections (10%~15%), allowing to reduce the employees' number of visual inspection and management costs.
￭ Increase detection capabilities:
Unifying detection parameters and consistent standards to avoid different judgements of each individual.
￭ Fast installation:
The installation can be completed within a few hours. Unlike the traditional machines, taking several days to install.
￭ Fast detection:
Inspection is carried out during the transmission process, which saves the time of random personnel inspections. It also does not reduce production capacity due to the inspection process.
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