Micro Inspection System
Model: MA6503D
Category: Compound Semiconductor Equipment
Exhibitor: SPIROX CORPORATION
Booth No: N214
Characteristic
Spirox MA6503D is a high quality image wafer inspection system with features of auto-storing defects image and position coordinate records to replace QC visual inspection on surface defects, including particles, scratches, etc.
【Features】
● Utilize a Line Scan Camera with wide FOV and fast scanning capabilities
● Use a 3x lens to enhance image quality and improve the defect characteristics inspection
● 5μm Defects Inspection Items: Particles, Scratches, Pad Defects, Bump Defects
● Support Probe Mark Inspection (PMI) and offer PAD quick selection for detection settings
● Support 3D inspection to measurement of Bump height and coplanarity
● Auto wafer-level chuck with ±1.7μm accuracy to process high accuracy wafer coordinate alignment
● Zoning parameter setting to realize accurate inspection requirement by zones
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