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SHASHIN KAGAKU

Model: iFTM

Category:

Exhibitor: SUNWAY SCIENTIFIC CORPORATION

Booth No: M335

Characteristic

Imaging film thickness monitor is a metrology tool that can visualize the film thickness distribution of a transparent multilayer film.
It can visualize the film thickness distribution with 0.1 nm thickness resolution by using the spectroscopic reflectometry.

▪ Visualize film thickness uniformity.
▪ Film thickness resolution: ＜0.1 nm
▪ High speed / Multilayer measurement up to 9 layers.
▪ Measurement of film thickness distribution in the specified region of the Objection field of view.

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