FAMous-Automatic Laser Processing Equipment

Category: Display & Solution - Mini & Micro LED

Booth No: M434

Characteristic

Repeatability of hole quality:
Machine calibration accuracy < ± 0.5 µm
Process accuracy <± 1 µm
Flexibility (drilling, cutting, engraving)
Round, square and other hole shapes capability 圓形孔，方形孔及異形孔
Hole taper control (positive, zero taper) 錐度控制 (0~45)
Precise control of hole depth精確控制鑽孔深度⩽ 5 µm
Minimum diameters ⩽ 30 µm with tight hole pitch (wall thickness ⩽ 15 µm)
Smooth drilled hole inner wall finish (Ra ≤ 1 µm)光滑的鑽孔內壁光潔度（Ra ≤ 1 µm）
No melting and micro-cracks in peripheries周邊無熔化和微裂紋
Minimal or no post-processing is needed (smooth surface finish under request)最少或不需要後處理（根據要求提供光滑的表面光潔度）
Ability to work with metalized and optically coated substrates能夠處理金屬化和光學塗層基材
Technical Hightlights :
Focal length measurement 焦距測量
Automatic loading / unloading solutions 自動上下料解決方案
Camera for positioning 定位用相機
Dust extraction 除塵
Automated Optical Inspection AOI檢測
SECS II / GEM Interface optional