Executive Engineer
Nissin Ion Equipment Co., Ltd
About three times higher productivity than conventional products Ion-implanters for SiC power devices 「IMPHEAT-II」
About three times higher productivity than conventional products
Compared to the IMPHEAT, the 1st generation of the high temperature ion implanter for SiC devices, the 2nd generation ion implanter, IMPHEAT-II, improved the productivity 3 times by using new ion source, handling system and high precision channel implantation was implemented.